The Logitech Orbis CMP system is a precision engineering floor CMP tool, ideal for R&D environments. Typically, the Orbis CMP System is used in applications that conduct pilot production tests with optimal analytical capabilities and improved processing performance.
Orbis CMP system is a precision engineering floor CMP tool, ideal for R&D environments
Manufacture of microelectromechanical systems (MEMS),
Manufacture of Bio-MEMS.
Low cost solution – high value results
The ability to conduct pilot process tests typically requires expensive production-level systems, but Orbis achieves this capability in a low-cost system. Incorporating enhanced features and high-tech functionality, the Orbis CMP System achieves processing capabilities superior to those normally offered in a system of this size.
Flexible use of the operation
In addition to its ability to replicate production-level environments, Orbis is also suitable for more traditional R&D use. This includes the production of small batches and pilot production tests. The system is capable of processing all arrays, wafer and partial wafers up to 200 mm (8 ″) in diameter using a dedicated carrier. As with previous Logitech CMP equipment, models and shims can be used or samples can be mounted directly on the sample holders.